ALD of Scandium Oxide from Scandium Tris(N,N'-diisopropylacetamidinate) and Water
Publication information:
Rouffignac, Philippe, Andrew Yousef, Kyoung Kim, and Roy Gordon. “ALD of Scandium Oxide from Scandium Tris(N,N’-Diisopropylacetamidinate) and Water”. Electrochemical and Solid-State Letters 9, no. 6 (2006): F45-F48.