Atomic layer epitaxy of rare earth oxide films on GaAs(111)A and their device properties

Publication information:

Liu, Yiqun, Min Xu, Jaeyeong Heo, Peide Ye, and Roy Gordon. “Atomic Layer Epitaxy of Rare Earth Oxide Films on GaAs(111)A and Their Device Properties”. Proceedings of the AVS Atomic Layer Deposition Conference, 2011, 1-18.