Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride of Tetrakis (dimethylamido) Titanium and Ammonia
Publication information:
Musher, Joshua, and Roy Gordon. “Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride of Tetrakis (dimethylamido) Titanium and Ammonia”. Journal of The Electrochemical Society 143, no. 2 (1996): 736-44.