Atmospheric pressure chemical vapor deposition of titanium nitride from titanium bromide and ammonia
Publication information:
Gordon, Roy, Ross Frisbie, Joshua Musher, and John Thornton. “Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride from Titanium Bromide and Ammonia”. Materials Research Society Symposium Proceedings 410, no. Covalent Ceramics III-Science and Technology of Non-oxides (1996): 283-88.