Atomic-layer-deposited LaAlO3/SrTiO3 all oxide field-effect transistors

Publication information:

Dong, Liu, Xu, Wu, Colby, Stach, Droopad, Gordon, and Ye. “Atomic-Layer-Deposited LaAlO3 SrTiO3 All Oxide Field-Effect Transistors”. Proceedings of the 2010 International Electronic Device Meeting 10 (2010): 10/588-10/591.