Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores
Publication information:
Chen, Peng, Toshiyuki Mitsui, Damon Farmer, Jene Golovchenko, Roy Gordon, and Daniel Branton. “Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores”. Nano Letters 4, no. 7 (2004): 1333-37.