Atomic layer deposition of gadolinium scandate films with high dielectric constant and low leakage current
Publication information:
Kim, Kyoung-Ha, Damon Farmer, Jean-Sebastien Lehn, Venkateswara Rao, and Roy Gordon. “Atomic Layer Deposition of Gadolinium Scandate Films With High Dielectric Constant and Low Leakage Current”. Applied Physics Letters 89, no. 13 (2006): 133512/1-133512/3.