Atomic layer deposition of lanthanum aluminum oxide nano-laminates for electrical applications
Publication information:
Lim, Booyong, Antti Rahtu, Philippe Rouffignac, and Roy Gordon. “Atomic Layer Deposition of Lanthanum Aluminum Oxide Nano-Laminates for Electrical Applications”. Applied Physics Letters 84, no. 20 (2004): 3957-59.