Atomic Layer Deposition of Y2O3 Thin Films from Yttrium Tris(N,N'-diisopropylacetamidinate) and Water
Publication information:
Rouffignac, Philippe, Jin-Seong Park, and Roy Gordon. “Atomic Layer Deposition of Y2O3 Thin Films from Yttrium Tris(N,N’-Diisopropylacetamidinate) and Water”. Chemistry of Materials 17, no. 19 (2005): 4808-14.