Atomic Layer Deposition of Zn(O,S) Thin Films with Tunable Electrical Properties by Oxygen Annealing
Publication information:
Park, Helen Hejin, Rachel Heasley, and Roy Gordon. “Atomic Layer Deposition of Zn(O,S) Thin Films With Tunable Electrical Properties by Oxygen Annealing”. Applied Physics Letters 102 (2013): 132110.1-10.