Designing Suitable Metal Amidinate Sources for TiN and Ba/Sr-containing Thin Films
Publication information:
Lehn, Jean-Sebastien, Qing Min Wang, Daewon Hong, Deo Shenai, Hongtao Wang, and Roy Gordon. “Designing Suitable Metal Amidinate Sources for TiN and Ba Sr-Containing Thin Films”. Proceedings of the AVS Atomic Layer Deposition Conference, 2008, 1-14.