Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films
Publication information:
Li, Zhefeng, Roy Gordon, Venkateswara Pallem, Huazhi Li, and Deo Shenai. “Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films”. Chemistry of Materials 22, no. 10 (2010): 3060-66.