Effects of Low Temperature O2 Treatment on the Electrical Properties of Amorphous LaAlO3 Films Made by Atomic Layer Deposition
Publication information:
Liu, Yiqun, Hoon Kim, Jun-Jieh Wang, Huazhi Li, and Roy Gordon. “Effects of Low Temperature O2 Treatment on the Electrical Properties of Amorphous LaAlO3 Films Made by Atomic Layer Deposition”. ECS Transactions 16, no. 5 (2008): 471-78.