FTIR study of copper agglomeration during atomic layer deposition of copper
Publication information:
Dai, Min, Jinhee Kwon, Yves Chabal, Mathew Halls, and Roy Gordon. “FTIR Study of Copper Agglomeration During Atomic Layer Deposition of Copper”. Materials Research Society Symposium Proceedings 1155 (CMOS Gate-Stack Scaling (2009): 1155-C11.