Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Depositon from a Novel Precursor
Publication information:
Becker, Jill, Seigi Suh, and Roy Gordon. “Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Depositon from a Novel Precursor”. Chemistry of Materials 15, no. 15 (2003): 2969-76.