Impact of ultrathin Al2O3 diffusion barriers on defects in high-k LaLuO3 on Si
Publication information:
Shen, Liu, Gordon, and Brillson. “Impact of Ultrathin Al2O3 Diffusion Barriers on Defects in High-K LaLuO3 on Si”. Applied Physics Letters 98, no. 17 (2011): 172902.1-2.