Investigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Formamidinates for Metallic Cobalt by ALD/CVD
Publication information:
Wang, Qing Min, Jean-Sebastien Lehn, Huazhi Li, Deo Shenai, Jing Yang, and Roy Gordon. “Investigation of Thermal Stability and Delivery of Cobalt Amidinates and Novel Cobalt Formamidinates for Metallic Cobalt by ALD CVD”. Proceedings of the AVS Atomic Layer Deposition Conference 1 (2011).