Low-temperature atomic-layer-deposition lift-off method for microelectronic and nanoelectronic applications
Publication information:
Biercuk, Monsma, Marcus, Becker, and Gordon. “Low-Temperature Atomic-Layer-Deposition Lift-off Method for Microelectronic and Nanoelectronic Applications”. Applied Physics Letters 83, no. 12 (2003): 2405-7.