Mechanisms of Atomic Layer Deposition on Substrates with Ultrahigh Aspect Ratios
Publication information:
Kucheyev, Biener, Baumann, Wang, Hamza, Li, Lee, and Gordon. “Mechanisms of Atomic Layer Deposition on Substrates With Ultrahigh Aspect Ratios”. Langmuir 24, no. 3 (2008): 943-48.