Monomeric chelated amides of aluminum and gallium: volatile, miscible liquid precursors for CVD
Publication information:
Barry, Sean, Roy Gordon, and Valerie Wagner. “Monomeric Chelated Amides of Aluminum and Gallium: Volatile, Miscible Liquid Precursors for CVD”. Materials Research Society Symposium Proceedings 606, no. Chemical Processing of Dielectrics, Insulators and Electronic Ceramics (2000): 83-89.