New Ni Amidinate Source for ALD/CVD of NiNx, NiO and NiSi
Publication information:
Li, Huazhi, Thiloma Perera, Deo Shenai, Zhefeng Li, and Roy Gordon. “New Ni Amidinate Source for ALD CVD of NiNx, NiO and NiSi”. Proceedings of the AVS Atomic Layer Deposition Conference, 2011, 1-12.