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Sealing Porous Low-k Dielectrics with Silica
Sealing Porous Low-k Dielectrics with Silica
Publication information:
Rouffignac, Philippe, Zhengwen Li, and Roy Gordon. “Sealing Porous Low-K Dielectrics With Silica”.
Electrochemical and Solid-State Letters
7, no. 12 (2004): G306-G308.
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