In Situ Infrared Characterization during Atomic Layer Deposition of Lanthanum Oxide
Publication information:
Kwon, Jinhee, Min Dai, Mathew Halls, Erik Langereis, Yves Chabal, and Roy Gordon. “In Situ Infrared Characterization During Atomic Layer Deposition of Lanthanum Oxide”. Journal of Physical Chemistry C 113, no. 2 (2009): 654-60.