(Sn,Al)Ox Films Grown by Atomic Layer Deposition
Publication information:
Heo, Jaeyeong, Yiqun Liu, Prasert Sinsermsuksakul, Zhefeng Li, Leizhi Sun, Wontae Noh, and Roy Gordon. “(Sn,Al)Ox Films Grown by Atomic Layer Deposition”. Proceedings of the AVS Atomic Layer Deposition Conference, 2011, 1-14.