Step Coverage and Material Properties of CVD Titanium Nitride Films from TDMAT and TDEAT Organic Precursors
Publication information:
Toprac, Anthony, Shi-Qing Wang, Joshua Musher, and Roy Gordon. “Step Coverage and Material Properties of CVD Titanium Nitride Films from TDMAT and TDEAT Organic Precursors”. Materials Research Society Symposium Proceedings 355, no. Evolution of Thin Film and Surface Structure and Morphology (1995): 323-28.