Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal
Publication information:
Li, Zhengwen, Sean Barry, and Roy Gordon. “Synthesis and Characterization of Copper(I) Amidinates As Precursors for Atomic Layer Deposition (ALD) of Copper Metal”. Inorganic Chemistry 44, no. 6 (2005): 1728-35.