Synthesis and decomposition kinetics of liquid precursors for chemical vapor deposition (CVD) of barium
Publication information:
Gordon, Roy, Sean Barry, Randy Broomhall-Dillard, Nicholas Jr. DiCeglie, Xinye Liu, and Daniel Teff. “Synthesis and Decomposition Kinetics of Liquid Precursors for Chemical Vapor Deposition (CVD) of Barium”. Electrochemical Society Proceedings 98-23, no. Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis (1999): 270-79.