Vapor Deposition of Ruthenium from an Amidinate Precursor
Publication information:
Li, Huazhi, Damon Farmer, Roy Gordon, Youbo Lin, and Joost Vlassak. “Vapor Deposition of Ruthenium from an Amidinate Precursor”. Journal of The Electrochemical Society 154, no. 12 (2007): D642-D647.